Cleanroom cleaning · ASML GSA

Grade 2 and Grade 4 cleaning.

Precision cleaning to Grade 2 or Grade 4 of the Generic Standard of ASML (GSA) for stainless steel and titanium parts – verified by visual inspection, particle measurement and RGA / outgassing, vacuum-packed and delivered with a cleanliness certificate.

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LENTIRE SCREWELECTROPOLISHED + KOLSTERISEDEPK = ELECTROPOLISHED + KOLSTERISED

Grade 2 and Grade 4 at a glance.

Both grades come from the Generic Standard of ASML (GSA), the reference for the semiconductor supply chain. Your specification decides which one your parts need.

2GRADE 2 CLEANINGSTRICTER LEVEL

The stricter of the two. Tight limits on particles and molecular contamination, with clean handling from production through packing – no bare-hand contact, approved lubricants only.

Typical use: vacuum and in-machine semiconductor parts

Grade 2 cleaning →
4GRADE 4 CLEANING

The standard cleanroom level. Parts are free of visible contamination and larger particles, cleaned and packed so they stay clean until assembly.

Typical use: cleanroom assembly outside the most critical zones

Grade 4 cleaning →
BOTH GRADESISO class 5–7 cleanroomsVacuum-packed per 5, 10, 25, 50 or 100Cleanliness certificateLot traceability

What differs, and what doesn't.

Grade 2Grade 4
LevelThe stricter levelThe standard cleanroom level
ContaminationTight limits on particles and molecular contaminationFree of visible contamination and larger particles
HandlingClean handling from production through packing – no bare-hand contact, approved lubricants onlyCleaned and packed so the parts stay clean until assembly
Typical useVacuum and in-machine semiconductor partsCleanroom assembly outside the most critical zones
Cleanroom classesISO class 5–7ISO class 5–7
PackagingVacuum-packed per 5, 10, 25, 50 or 100Vacuum-packed per 5, 10, 25, 50 or 100
DocumentsCleanliness certificate and lot traceabilityCleanliness certificate and lot traceability

Checked before the certificate.

Cleanliness is verified before the cleanliness certificate is issued – under an ISO 9001:2015 quality system, with full lot traceability.

  1. 01Visual inspectionParts are inspected for visible contamination and residue.
  2. 02Particle measurementParticles on the surface are measured against the limits of the grade.
  3. 03RGA / outgassingResidual gas analysis shows what a part releases under vacuum.

From stock, to your drawing, or your own parts.

EPK parts from stock3–4 weeks

100.000+ electropolished and Kolsterised A2 and A4 parts in stock – socket head cap screws, hex nuts, washers and dowel pins, cleaning included.

Your own parts2–3 weeks

Your fasteners and turned or milled parts in stainless steel or titanium, cleaned to Grade 2 or Grade 4 and returned vacuum-packed. EPK on request.

Engineered partsTo your drawing

Stainless or titanium parts made to your drawing, with or without vacuum hole – same cleaning and vacuum packing.

Which grade do you need?

Your specification decides. Grade 2 is typical for vacuum and in-machine semiconductor parts, Grade 4 for cleanroom assembly outside the most critical zones. Send us your specification and Terry confirms the grade with your quote.

Not to be confused with titanium Grade 2, 4 and 5: those are material grades, not cleaning grades.

Grade 2 and Grade 4 cleaning – frequently asked questions.

What is Grade 2 cleaning?
The stricter of the two cleaning grades in the Generic Standard of ASML (GSA). Tight limits on particles and molecular contamination, with clean handling from production through packing – no bare-hand contact, approved lubricants only. Typical use: vacuum and in-machine semiconductor parts.
What is Grade 4 cleaning?
The standard cleanroom level in the Generic Standard of ASML (GSA). Parts are free of visible contamination and larger particles, cleaned and packed so they stay clean until assembly. Typical use: cleanroom assembly outside the most critical zones.
How does HBS verify Grade 2 and Grade 4 cleanliness?
By visual inspection, particle measurement and RGA / outgassing analysis before the cleanliness certificate is issued. Every pack is vacuum-packed and traceable to its lot.
Which parts can HBS clean to Grade 2 or Grade 4?
EPK-treated A2 and A4 parts from stock (100.000+ in stock, 3–4 weeks including cleaning), engineered parts made to your drawing, and your own fasteners or turned and milled parts in stainless steel or titanium (2–3 weeks).
Is titanium Grade 2 the same as Grade 2 cleaning?
No. Titanium Grade 2, 4 and 5 are material grades. Grade 2 and Grade 4 cleaning are cleanliness levels from the Generic Standard of ASML (GSA) and apply to the cleaning of the part, whatever its material.
GRADE 2 · GRADE 4

Cleaned to your grade.

Tell us the parts, the grade and the quantity – Terry replies within 24 hours.

REQUEST A CLEANROOM QUOTE →
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